Studies of the electron kinetics in capacitively coupled Ar/ 𝐎𝟐 mixture plasma generated by A.C power discharge

来源: 聚变理论与模拟中心 作者: 时间:2023-07-03 访问次数:2

105.Studies of the electron kinetics in capacitively coupled Ar-O2 mixture plasma generated by AC power discharge.pdf